| 2026-08-06 | Press release | Axcelis Announces Financial Results for Second Quarter 2026 |
| 2026-08-06 | Deck | Q2 2026 Earnings Presentation |
| 2026-08-06 | 8-K | Form 8-K, Item 2.02 results |
| 2026-08-06 | 10-Q | Form 10-Q for the quarter ended Jun 30 |
| 2026-07-29 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences in August |
| 2026-07-28 | Press release | Axcelis Announces Successful Purion XEmax Eval Closure at Leading Semiconductor Foundry |
| 2026-07-22 | Press release | Axcelis Announces Timing and Availability of Second Quarter 2026 Results and Conference Call |
| 2026-05-12 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences |
| 2026-05-08 | 10-Q | Form 10-Q for the quarter ended Mar 31 |
| 2026-05-07 | Deck | Q1 2026 Earnings Presentation |
| 2026-05-07 | Press release | Axcelis Announces Financial Results for First Quarter 2026 |
| 2026-05-07 | 8-K | Form 8-K, Item 2.02 results |
| Transcript | Q1 FY26 earnings call transcript |
| 2026-05-06 | Press release | Axcelis to Participate in ASMC 2026 |
| 2026-05-06 | 8-K | Form 8-K, Item 5.07 |
| 2026-04-23 | Press release | Axcelis Announces Timing and Availability of First Quarter 2026 Results and Conference Call |
| 2026-03-31 | Proxy | Definitive proxy statement |
| 2026-03-30 | Press release | Axcelis Announces SBTi Approval of Science-Based Greenhouse Gas Emissions Reduction Targets |
| 2026-03-19 | Press release | Axcelis Announces Participation in SEMICON China 2026 |
| 2026-03-12 | Press release | Axcelis Announces CFO Transition |
| 2026-03-12 | 8-K | Form 8-K, Item 5.02 |
| 2026-02-26 | 10-K | Annual report on Form 10-K, FY25 |
| 2026-02-23 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences |
| 2026-02-18 | Transcript | Q4 FY25 earnings call transcript |
| 2026-02-17 | Press release | Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025 |
| 2026-02-17 | 8-K | Form 8-K, Item 2.02 results |
| 2026-02-06 | Press release | Axcelis Stockholders Approve Merger with Veeco |
| 2026-02-06 | 8-K | Form 8-K, Item 5.07 |
| 2026-02-04 | Press release | Axcelis Unveils Purion H6: Next-Generation High Current Ion Implanter for Advanced Semiconductor Manufacturing |
| 2026-02-04 | Press release | Axcelis Announces Participation in SEMICON Korea 2026 |
| 2026-02-02 | 8-K | Form 8-K, Item 8.01 |
| 2026-01-28 | 8-K | Form 8-K, Item 8.01 |
| 2026-01-26 | Press release | Axcelis Announces Timing and Availability of Fourth Quarter and Full Year 2025 Results and Conference Call |
| 2026-01-08 | Press release | Axcelis to Participate in the 28th Annual Needham Growth Conference |
| 2025-11-06 | 10-Q | Form 10-Q for the quarter ended Sep 30 |
| 2025-11-04 | Deck | Q3 2025 Earnings Presentation |
| 2025-11-04 | Press release | Axcelis Announces Financial Results for Third Quarter 2025 |
| 2025-11-04 | 8-K | Form 8-K, Item 2.02 results |
| 2025-10-22 | Press release | Axcelis Announces Timing and Availability of Third Quarter 2025 Results and Conference Call |
| 2025-10-01 | Deck | Axcelis + Veeco Merger Presentation |