| 2026-08-05 | 8-K | 8-K filed 2026-08-05 by AMTECH SYSTEMS INC |
| 2026-08-05 | 10-Q | 10-Q filed 2026-08-05 by AMTECH SYSTEMS INC |
| 2026-08-05 | 8-K | 8-K filed 2026-08-05 by AMTECH SYSTEMS INC |
| 2026-06-03 | 8-K | 8-K filed 2026-06-03 by AMTECH SYSTEMS INC |
| 2026-05-07 | 8-K | 8-K filed 2026-05-07 by AMTECH SYSTEMS INC |
| 2026-05-07 | 10-Q | 10-Q filed 2026-05-07 by AMTECH SYSTEMS INC |
| 2026-05-07 | 8-K | 8-K filed 2026-05-07 by AMTECH SYSTEMS INC |
| 2026-04-30 | 8-K | 8-K filed 2026-04-30 by AMTECH SYSTEMS INC |
| 2026-03-06 | 8-K | 8-K filed 2026-03-06 by AMTECH SYSTEMS INC |
| 2026-02-05 | 10-Q | 10-Q filed 2026-02-05 by AMTECH SYSTEMS INC |
| 2026-02-05 | 8-K | 8-K filed 2026-02-05 by AMTECH SYSTEMS INC |
| 2026-01-23 | DEF 14A | DEF 14A filed 2026-01-23 by AMTECH SYSTEMS INC |
| 2025-12-15 | 8-K | 8-K filed 2025-12-15 by AMTECH SYSTEMS INC |
| 2025-12-10 | 10-K | 10-K filed 2025-12-10 by AMTECH SYSTEMS INC |
| 2025-12-10 | 8-K | 8-K filed 2025-12-10 by AMTECH SYSTEMS INC |
| 2025-12-01 | 8-K | 8-K filed 2025-12-01 by AMTECH SYSTEMS INC |
| 2025-12-01 | 8-K | 8-K filed 2025-12-01 by AMTECH SYSTEMS INC |
| 2025-08-06 | 10-Q | 10-Q filed 2025-08-06 by AMTECH SYSTEMS INC |
| 2025-08-06 | 8-K | 8-K filed 2025-08-06 by AMTECH SYSTEMS INC |
| 2025-05-12 | 8-K | 8-K filed 2025-05-12 by AMTECH SYSTEMS INC |
| 2025-05-12 | 10-Q | 10-Q filed 2025-05-12 by AMTECH SYSTEMS INC |
| 2025-04-09 | 8-K | 8-K filed 2025-04-09 by AMTECH SYSTEMS INC |
| 2025-03-07 | 8-K | 8-K filed 2025-03-07 by AMTECH SYSTEMS INC |
| 2025-02-05 | 10-Q | 10-Q filed 2025-02-05 by AMTECH SYSTEMS INC |
| 2025-02-05 | 8-K | 8-K filed 2025-02-05 by AMTECH SYSTEMS INC |
| 2025-01-24 | DEF 14A | DEF 14A filed 2025-01-24 by AMTECH SYSTEMS INC |
| 2025-01-23 | 8-K | 8-K filed 2025-01-23 by AMTECH SYSTEMS INC |
| 2024-12-12 | 10-K | 10-K filed 2024-12-12 by AMTECH SYSTEMS INC |
| 2024-12-09 | 8-K | 8-K filed 2024-12-09 by AMTECH SYSTEMS INC |
| 2024-09-17 | 8-K | 8-K filed 2024-09-17 by AMTECH SYSTEMS INC |