| 2026-08-06 | Press release | Axcelis Announces Financial Results for Second Quarter 2026 |
| 2026-08-06 | Earnings deck | Q2 2026 Earnings Presentation |
| 2026-07-29 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences in August |
| 2026-07-28 | Press release | Axcelis Announces Successful Purion XEmax Eval Closure at Leading Semiconductor Foundry |
| 2026-07-22 | Press release | Axcelis Announces Timing and Availability of Second Quarter 2026 Results and Conference Call |
| 2026-05-12 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences |
| 2026-05-07 | Earnings deck | Q1 2026 Earnings Presentation |
| 2026-05-07 | Press release | Axcelis Announces Financial Results for First Quarter 2026 |
| 2026-05-06 | Press release | Axcelis to Participate in ASMC 2026 |
| 2026-04-23 | Press release | Axcelis Announces Timing and Availability of First Quarter 2026 Results and Conference Call |
| 2026-03-30 | Press release | Axcelis Announces SBTi Approval of Science-Based Greenhouse Gas Emissions Reduction Targets |
| 2026-03-19 | Press release | Axcelis Announces Participation in SEMICON China 2026 |
| 2026-03-12 | Press release | Axcelis Announces CFO Transition |
| 2026-02-23 | Press release | Axcelis Announces Participation in Upcoming Investor Conferences |
| 2026-02-17 | Press release | Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025 |
| 2026-02-06 | Press release | Axcelis Stockholders Approve Merger with Veeco |
| 2026-02-04 | Press release | Axcelis Unveils Purion H6: Next-Generation High Current Ion Implanter for Advanced Semiconductor Manufacturing |
| 2026-02-04 | Press release | Axcelis Announces Participation in SEMICON Korea 2026 |
| 2026-01-26 | Press release | Axcelis Announces Timing and Availability of Fourth Quarter and Full Year 2025 Results and Conference Call |
| 2026-01-08 | Press release | Axcelis to Participate in the 28th Annual Needham Growth Conference |
| 2025-11-03 | Earnings deck | Q3 2025 Earnings Presentation |
| Press release | Axcelis Announces Financial Results for Third Quarter 2025 |
| Press release | Axcelis Announces Timing and Availability of Third Quarter 2025 Results and Conference Call |
| 2025-10-01 | Presentation | Axcelis + Veeco Merger Presentation |
| 2025-08-04 | Earnings deck | Q2 2025 Earnings Presentation |
| Document | Axcelis Announces Financial Results for Second Quarter 2025 |
| Press release | Axcelis Announces Timing and Availability of Second Quarter 2025 Results and Conference Call |
| 2025-05-05 | Earnings deck | Q1 2025 Earnings Presentation |
| Press release | Axcelis Announces Financial Results for First Quarter 2025 |
| 2025-05-06 | Regulatory report | 0001104659-25-045080.pdf |
| Press release | Axcelis Announces Timing and Availability of First Quarter 2025 Results and Conference Call |
| 2025-02-10 | Press release | Axcelis Announces Financial Results for Fourth Quarter and Full Year 2024 |
| 2024-11-06 | Press release | Axcelis Announces Financial Results for Third Quarter 2024 |
| 2024-07-31 | Press release | Axcelis Announces Financial Results for Second Quarter 2024 |
| 2024-05-01 | Press release | Axcelis Announces Financial Results for First Quarter 2024 |
| 2024-02-07 | Press release | Axcelis Announces Financial Results for Fourth Quarter and Full Year 2023 |
| 2023-11-01 | Press release | Axcelis Announces Financial Results for Third Quarter 2023 |
| 2023-08-02 | Press release | Axcelis Announces Financial Results for Second Quarter 2023 |
| 2023-05-03 | Press release | Axcelis Announces Financial Results for First Quarter 2023 |
| 2023-02-08 | Press release | Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022 |