| 2026-08-06 | 10-Q | 10-Q filed 2026-08-06 by AXCELIS TECHNOLOGIES INC |
| 2026-08-06 | 8-K | 8-K filed 2026-08-06 by AXCELIS TECHNOLOGIES INC |
| 2026-05-08 | 10-Q | 10-Q filed 2026-05-08 by AXCELIS TECHNOLOGIES INC |
| 2026-05-07 | 8-K | 8-K filed 2026-05-07 by AXCELIS TECHNOLOGIES INC |
| 2026-05-06 | 8-K | 8-K filed 2026-05-06 by AXCELIS TECHNOLOGIES INC |
| 2026-03-31 | DEF 14A | DEF 14A filed 2026-03-31 by AXCELIS TECHNOLOGIES INC |
| 2026-03-12 | 8-K | 8-K filed 2026-03-12 by AXCELIS TECHNOLOGIES INC |
| 2026-02-26 | 10-K | 10-K filed 2026-02-26 by AXCELIS TECHNOLOGIES INC |
| 2026-02-17 | 8-K | 8-K filed 2026-02-17 by AXCELIS TECHNOLOGIES INC |
| 2026-02-06 | 8-K | 8-K filed 2026-02-06 by AXCELIS TECHNOLOGIES INC |
| 2026-02-02 | 8-K | 8-K filed 2026-02-02 by AXCELIS TECHNOLOGIES INC |
| 2026-01-28 | 8-K | 8-K filed 2026-01-28 by AXCELIS TECHNOLOGIES INC |
| 2025-11-06 | 10-Q | 10-Q filed 2025-11-06 by AXCELIS TECHNOLOGIES INC |
| 2025-11-04 | 8-K | 8-K filed 2025-11-04 by AXCELIS TECHNOLOGIES INC |
| 2025-10-01 | 8-K | 8-K filed 2025-10-01 by AXCELIS TECHNOLOGIES INC |
| 2025-10-01 | 8-K | 8-K filed 2025-10-01 by AXCELIS TECHNOLOGIES INC |
| 2025-08-05 | 10-Q | 10-Q filed 2025-08-05 by AXCELIS TECHNOLOGIES INC |
| 2025-08-05 | 8-K | 8-K filed 2025-08-05 by AXCELIS TECHNOLOGIES INC |
| 2025-05-08 | 8-K | 8-K filed 2025-05-08 by AXCELIS TECHNOLOGIES INC |
| 2025-05-06 | 10-Q | 10-Q filed 2025-05-06 by AXCELIS TECHNOLOGIES INC |
| 2025-05-06 | 8-K | 8-K filed 2025-05-06 by AXCELIS TECHNOLOGIES INC |
| 2025-04-21 | 8-K | 8-K filed 2025-04-21 by AXCELIS TECHNOLOGIES INC |
| 2025-03-31 | DEF 14A | DEF 14A filed 2025-03-31 by AXCELIS TECHNOLOGIES INC |
| 2025-03-12 | 8-K | 8-K filed 2025-03-12 by AXCELIS TECHNOLOGIES INC |
| 2025-02-28 | 10-K | 10-K filed 2025-02-28 by AXCELIS TECHNOLOGIES INC |
| 2025-02-10 | 8-K | 8-K filed 2025-02-10 by AXCELIS TECHNOLOGIES INC |
| 2025-01-10 | 8-K | 8-K filed 2025-01-10 by AXCELIS TECHNOLOGIES INC |
| 2024-11-07 | 10-Q | 10-Q filed 2024-11-07 by AXCELIS TECHNOLOGIES INC |
| 2024-11-06 | 8-K | 8-K filed 2024-11-06 by AXCELIS TECHNOLOGIES INC |
| 2024-08-01 | 10-Q | 10-Q filed 2024-08-01 by AXCELIS TECHNOLOGIES INC |